Scribing of sapphire by dry-etching-asisted femtosecond laser fabrication
نویسندگان
چکیده
منابع مشابه
Femtosecond Laser Ablation of Sapphire
INSTRUCTION Sapphire is widely used in the field of optical components and micromechanical devices owing to its useful mechanical, optical, and electrical properties. However, sapphire is mechanically and chemically difficult to machine because of its high hardness and chemical stability. The difficulty of machining sapphire has restricted the development of advanced device structures. As sapph...
متن کاملOptimization of Uv Laser Scribing Process for Led Sapphire Wafers
Billions of LEDs are used today in traffic control, automotive headlights, flat panel display technology, mobile devices, back lighting, projection and general illumination applications. With the dramatic growth in LEDs, manufacturers are looking for technologies to increase production yield and decrease cost. Sapphire wafer singulation into miniature dies is one of the critical steps used in b...
متن کاملFabrication of epitaxial GaAs/AIGaAs diaphragms by selective dry etching
A selective dry process is used to fabricate epitaxial diaphragms by etching anisotropic cavities through a GaAs substrate to an AIGaAs stop-etch layer. Active devices are built directly on the layers comprising the diaphragm. The etching process follows the device fabrication sequence facilitating integration of these structures with pre-existing electronic circuitry. Potentiai applications in...
متن کاملTailored surface birefringence by femtosecond laser assisted wet etching.
Surface texturing is demonstrated by the combination of wet etching and ultrafast laser nanostructuring of silica glass. Using potassium hydroxide (KOH) at room temperature as an etchant of laser modified glass, we show the polarization dependent linear increase in retardance reaching a threefold value within 25 hours. The dispersion control of birefringence by the etching procedure led to achr...
متن کاملOptimization of UV laser scribing process for light emitting diode sapphire wafers
Billions of light emitting diodes LEDs are used today in traffic control, automotive headlights, flat panel display technology, mobile devices, back lighting, projection, and general illumination applications. With the dramatic growth in LEDs, manufacturers are looking for technologies to increase production yield and decrease cost. Sapphire wafer singulation into miniature dies is one of the c...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: Kexue tongbao
سال: 2021
ISSN: ['0023-074X', '2095-9419']
DOI: https://doi.org/10.1360/tb-2020-1224